SILICON MICROSTRUCTURES
INCORPORATED
SM5420
Low-Cost, SO-8 Packaged Pressure Sensor
For High-Volume Applications Ultra-Small, Low Cost OEM Pressure Package
DESCRIPTION
The SM5420 is a small outline SO-8 packaged pressure sensor. The sensor uses SMI’s SM5108 micromachined, piezoresistive pressure sensing chip that has been optimized to provide the highest possible accuracy for a package of this size. This performance is achieved through careful resistor placement and mechanical configurat